ISO 14644-3:2019版 洁净室及相关受控环境----- 第3 部分: 检测方法

本文件为内容修订。与前版本相比，主要变化有：

— Clause B.7 has been simplified and corrected to address concernsover its complexity and noted errors;

简化第B.7 条，纠正为解决其复杂质关切和所注意到的错误；

— guidance concerning classification of air cleanliness by airborneparticle concentration has been

moved to 14644-1[1]

—对根据空气尘粒浓度进行空气洁净度分级相关的指南已转至14644-1。

— the text of the whole document has been revised or clarified to aidin application.

—整个文件正文内容进行了修订或澄清，以帮助应用。

A list of all parts in the ISO 14644 seriescan be found on the ISO website.

可在ISO 官网上找到 ISO 14644 系列的所有部分。